Thermal Stability of Sputtered W-Si-N Coatings
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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| Translated title of the contribution | Thermal Stability of Sputtered W-Si-N Coatings |
|---|---|
| Original language | English |
| Title of host publication | 34 th International Conference on Metallurgical Coatings and Thin Films |
| Pages | 36-36 |
| Publication status | Published - 2007 |
