The origin of stresses in magnetron sputtered thin films
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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| Translated title of the contribution | The origin of stresses in magnetron sputtered thin films |
|---|---|
| Original language | English |
| Title of host publication | Proceedings of 4th International Conference on Surface, coatings and Nanostructured Materials |
| Pages | 44-44 |
| Publication status | Published - 2009 |
