Structure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings

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Translated title of the contributionStructure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings
Original languageEnglish
Pages (from-to)114-118
JournalInternational journal of materials research : IJMR ; Zeitschrift für Metallkunde
Volume100
Publication statusPublished - 2009