Structure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings
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Translated title of the contribution | Structure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings |
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Original language | English |
Pages (from-to) | 114-118 |
Journal | International journal of materials research : IJMR ; Zeitschrift für Metallkunde |
Volume | 100 |
Publication status | Published - 2009 |