Structure, stress and stress relaxation of TiN/Cu multilayer and nanocomposite coatings
Research output: Contribution to conference › Poster › Research › peer-review
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Details
| Translated title of the contribution | Structure, stress and stress relaxation of TiN/Cu multilayer and nanocomposite coatings |
|---|---|
| Original language | English |
| Publication status | Published - 2007 |
| Event | Symposium on Reactive Sputter Deposition - Leoben, Austria Duration: 6 Dec 2007 → 7 Dec 2007 |
Conference
| Conference | Symposium on Reactive Sputter Deposition |
|---|---|
| Country/Territory | Austria |
| City | Leoben |
| Period | 6/12/07 → 7/12/07 |
