Structure evolution in reactively sputtered molybdenum oxide thin films
Research output: Contribution to journal › Article › Research › peer-review
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Structure evolution in reactively sputtered molybdenum oxide thin films. / Pachlhofer, Julia; Jachs, Christoph; Franz, Robert et al.
In: Vacuum, No. 131, 2016, p. 246-251.
In: Vacuum, No. 131, 2016, p. 246-251.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Pachlhofer, J, Jachs, C, Franz, R, Franzke, E, Köstenbauer, H, Winkler, J & Mitterer, C 2016, 'Structure evolution in reactively sputtered molybdenum oxide thin films', Vacuum, no. 131, pp. 246-251. https://doi.org/10.1016/j.vacuum.2016.07.002
APA
Pachlhofer, J., Jachs, C., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., & Mitterer, C. (2016). Structure evolution in reactively sputtered molybdenum oxide thin films. Vacuum, (131), 246-251. https://doi.org/10.1016/j.vacuum.2016.07.002
Vancouver
Pachlhofer J, Jachs C, Franz R, Franzke E, Köstenbauer H, Winkler J et al. Structure evolution in reactively sputtered molybdenum oxide thin films. Vacuum. 2016;(131):246-251. doi: http://dx.doi.org/10.1016/j.vacuum.2016.07.002
Author
Bibtex - Download
@article{4330ca23263e4966816d8ed21f6e4a82,
title = "Structure evolution in reactively sputtered molybdenum oxide thin films",
keywords = "Molybdenum oxide, Thin film, MoO2, MoO3, Reactive sputtering",
author = "Julia Pachlhofer and Christoph Jachs and Robert Franz and Enrico Franzke and H. K{\"o}stenbauer and J{\"o}rg Winkler and Christian Mitterer",
year = "2016",
doi = "http://dx.doi.org/10.1016/j.vacuum.2016.07.002",
language = "English",
pages = "246--251",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",
number = "131",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Structure evolution in reactively sputtered molybdenum oxide thin films
AU - Pachlhofer, Julia
AU - Jachs, Christoph
AU - Franz, Robert
AU - Franzke, Enrico
AU - Köstenbauer, H.
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2016
Y1 - 2016
KW - Molybdenum oxide
KW - Thin film
KW - MoO2
KW - MoO3
KW - Reactive sputtering
U2 - http://dx.doi.org/10.1016/j.vacuum.2016.07.002
DO - http://dx.doi.org/10.1016/j.vacuum.2016.07.002
M3 - Article
SP - 246
EP - 251
JO - Vacuum
JF - Vacuum
SN - 0042-207X
IS - 131
ER -
