Structure evolution in reactively sputtered molybdenum oxide thin films
Research output: Contribution to journal › Article › Research › peer-review
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- PLANSEE SE
Details
| Original language | English |
|---|---|
| Pages (from-to) | 246-251 |
| Number of pages | 6 |
| Journal | Vacuum |
| Issue number | 131 |
| DOIs | |
| Publication status | Published - 2016 |
