Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films
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| Translated title of the contribution | Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films |
|---|---|
| Original language | English |
| Pages (from-to) | 7716-7719 |
| Journal | Journal of physics / D, Applied physics |
| Volume | 40 |
| DOIs | |
| Publication status | Published - 2007 |
