Simulation von EUV-Spiegeln
Research output: Contribution to conference › Poster › Transfer
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Simulation von EUV-Spiegeln. / Meisels, Ronald.
2018. Poster session presented at Silicon Alps Spotlight, Leoben, Austria.
2018. Poster session presented at Silicon Alps Spotlight, Leoben, Austria.
Research output: Contribution to conference › Poster › Transfer
Harvard
Meisels, R 2018, 'Simulation von EUV-Spiegeln', Silicon Alps Spotlight, Leoben, Austria, 17/05/18 - 17/05/18.
APA
Meisels, R. (2018). Simulation von EUV-Spiegeln. Poster session presented at Silicon Alps Spotlight, Leoben, Austria.
Vancouver
Meisels R. Simulation von EUV-Spiegeln. 2018. Poster session presented at Silicon Alps Spotlight, Leoben, Austria.
Author
Bibtex - Download
@conference{76610dccd8b94654b7fb3a370b119007,
title = "Simulation von EUV-Spiegeln",
author = "Ronald Meisels",
year = "2018",
month = may,
day = "17",
language = "Deutsch",
note = "Silicon Alps Spotlight : Neue Materialien und Materialtechnologien f{\"u}r Innovationen in der Mikroelektronik ; Conference date: 17-05-2018 Through 17-05-2018",
url = "https://www.silicon-alps.at/veranstaltungen/silicon-alps-spotlight-materialforschung-fuer-mikroelektronik-in-leoben/",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Simulation von EUV-Spiegeln
AU - Meisels, Ronald
PY - 2018/5/17
Y1 - 2018/5/17
M3 - Poster
T2 - Silicon Alps Spotlight
Y2 - 17 May 2018 through 17 May 2018
ER -
