Mo, J.,
Schaffar, G. J. K.,
Du, L.,
Maier-Kiener, V.,
Kiener, D.,
Vollebregt, S. &
Zhang, G.,
2024,
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 37.2024.
p. 626-629 4 p. (IEEE access).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution