Pulsed laser decomposition of silicon containing carbon thin films
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Pulsed laser decomposition of silicon containing carbon thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 360-364 |
| Journal | Surface & coatings technology |
| Volume | 177-178 |
| Publication status | Published - 2004 |
