Phase stability and decomposition products of Ti-Al-Ta-N thin films
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| Translated title of the contribution | Phase stability and decomposition products of Ti-Al-Ta-N thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 151901-1-151901-3 |
| Journal | Applied physics letters |
| Volume | 97 |
| Publication status | Published - 2010 |
