Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
Research output: Contribution to journal › Article › Research › peer-review
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Oxidation and wet etching behavior of sputtered Mo-Ti-Al films. / Jörg, Tanja; Hofer-Roblyek, Anna Maria; Köstenbauer, Harald et al.
In: Journal of vacuum science & technology / A (JVST), Vol. 36, 2018, p. 021513-1-021513-5.
In: Journal of vacuum science & technology / A (JVST), Vol. 36, 2018, p. 021513-1-021513-5.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Jörg, T, Hofer-Roblyek, AM, Köstenbauer, H, Winkler, J & Mitterer, C 2018, 'Oxidation and wet etching behavior of sputtered Mo-Ti-Al films', Journal of vacuum science & technology / A (JVST), vol. 36, pp. 021513-1-021513-5. https://doi.org/10.1116/1.5009289
APA
Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J., & Mitterer, C. (2018). Oxidation and wet etching behavior of sputtered Mo-Ti-Al films. Journal of vacuum science & technology / A (JVST), 36, 021513-1-021513-5. https://doi.org/10.1116/1.5009289
Vancouver
Jörg T, Hofer-Roblyek AM, Köstenbauer H, Winkler J, Mitterer C. Oxidation and wet etching behavior of sputtered Mo-Ti-Al films. Journal of vacuum science & technology / A (JVST). 2018;36:021513-1-021513-5. doi: 10.1116/1.5009289
Author
Bibtex - Download
@article{1716c458c49b4e2a9e9e88eb91db28ed,
title = "Oxidation and wet etching behavior of sputtered Mo-Ti-Al films",
author = "Tanja J{\"o}rg and Hofer-Roblyek, {Anna Maria} and Harald K{\"o}stenbauer and J{\"o}rg Winkler and Christian Mitterer",
year = "2018",
doi = "10.1116/1.5009289",
language = "English",
volume = "36",
pages = "021513--1--021513--5",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
AU - Jörg, Tanja
AU - Hofer-Roblyek, Anna Maria
AU - Köstenbauer, Harald
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1116/1.5009289
DO - 10.1116/1.5009289
M3 - Article
VL - 36
SP - 021513-1-021513-5
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
ER -
