Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
Details
| Translated title of the contribution | Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films |
|---|---|
| Original language | English |
| Journal | Journal of applied physics |
| Volume | 97 |
| DOIs | |
| Publication status | Published - 2005 |
