Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Research output: Contribution to conferencePosterResearchpeer-review

Authors

  • Sascha Kremmer
  • G. Tallarida
  • S. Spiga
  • C. Wiemer
  • M. Fanciulli

Organisational units

Details

Translated title of the contributionNano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Original languageEnglish
Publication statusPublished - 2006
Event14th International Winterschool on New Developments in Solid State Physics - Mauterndorf, Austria
Duration: 13 Feb 200617 Feb 2006

Conference

Conference14th International Winterschool on New Developments in Solid State Physics
Country/TerritoryAustria
CityMauterndorf
Period13/02/0617/02/06