Microstructure-property relations of reactively magnetron sputtered VCxNy films

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Authors

Translated title of the contribution	Microstructure-property relations of reactively magnetron sputtered VCxNy films
Original language	English
Pages (from-to)	3805-3809
Journal	Surface & coatings technology
DOIs	https://doi.org/10.1016/j.surfcoat.2011.01.037
Publication status	Published - 2011