Microstructure and mechancial properties of sputtered intermetallic Al-Au coatings

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Translated title of the contributionMicrostructure and mechancial properties of sputtered intermetallic Al-Au coatings
Original languageEnglish
Pages (from-to)023523-1-023523-6
JournalJournal of applied physics
Volume102
DOIs
Publication statusPublished - 2007