TY - JOUR

T1 - Microstructural and mechanical properties of TiN/CrN and TiSiN/CrN multilayer coatings deposited in an industrial-scale HiPIMS system: Effect of the Si incorporation

AU - Sala, Neus

AU - Rebelo de Figueiredo, Marisa

AU - Franz, Robert

AU - Kainz, Christina

AU - Sánchez-López, J.C.

AU - Rojas, T.C.

AU - Fernández de los Reyes, D.

AU - Colominas, Carles

AU - Abdad, M.D.

N1 - Publisher Copyright: © 2024 Elsevier B.V.

PY - 2024/10/18

Y1 - 2024/10/18

N2 - Surface engineering through the deposition of advanced coatings, particularly multilayer coatings has gained significant interest for enhancing the performance of coated parts. The incorporation of Si into TiN coatings has shown promise for improving hardness, oxidation resistance, and thermal stability, while high-power impulse magnetron sputtering (HiPIMS) has emerged as a technique to deposit coatings with exceptional properties. However, TiN/CrN and TiSiN/CrN coatings deposited by HiPIMS remain relatively unexplored. In this study, different TiN/CrN and TiSiN/CrN multilayer coatings with different bilayer periods from 5 to 85 nm were deposited using an industrial-scale HiPIMS reactor, and their microstructure and mechanical properties were investigated using advanced characterization techniques. Results revealed successful deposition of smooth and compact coatings with controlled bilayer periods. X-ray diffraction analysis showed separate crystalline phases for coatings with high bilayer periods, while those with smaller bilayer periods exhibited peak-overlapping and superlattice overtones, especially for the TiN/CrN coatings. Epitaxial grain growth was confirmed by high-resolution transmission electron microscopy (HRTEM). HRTEM and electron energy-loss spectroscopy measurements confirmed Si incorporation into the TiN crystal lattice of TiSiN/CrN coatings reducing the crystallinity, especially for coatings with smaller bilayer periods. Nanoindentation tests revealed that coatings with a bilayer period of 15–20 nm displayed the highest hardness values regardless of the composition. The mechanical properties of the TiSiN/CrN coatings showed no improvement over those of the TiN/CrN coatings, attributed to the Si induced amorphization of the Ti(Si)N phase and the absence of SiN x phase segregation within the TiN nanocrystals in these coatings. These findings provide valuable insights into the microstructure and mechanical properties of TiN/CrN and TiSiN/CrN multilayer coatings deposited by HiPIMS in an industrial scale reactor, paving the way for their application in various industrial sectors.

AB - Surface engineering through the deposition of advanced coatings, particularly multilayer coatings has gained significant interest for enhancing the performance of coated parts. The incorporation of Si into TiN coatings has shown promise for improving hardness, oxidation resistance, and thermal stability, while high-power impulse magnetron sputtering (HiPIMS) has emerged as a technique to deposit coatings with exceptional properties. However, TiN/CrN and TiSiN/CrN coatings deposited by HiPIMS remain relatively unexplored. In this study, different TiN/CrN and TiSiN/CrN multilayer coatings with different bilayer periods from 5 to 85 nm were deposited using an industrial-scale HiPIMS reactor, and their microstructure and mechanical properties were investigated using advanced characterization techniques. Results revealed successful deposition of smooth and compact coatings with controlled bilayer periods. X-ray diffraction analysis showed separate crystalline phases for coatings with high bilayer periods, while those with smaller bilayer periods exhibited peak-overlapping and superlattice overtones, especially for the TiN/CrN coatings. Epitaxial grain growth was confirmed by high-resolution transmission electron microscopy (HRTEM). HRTEM and electron energy-loss spectroscopy measurements confirmed Si incorporation into the TiN crystal lattice of TiSiN/CrN coatings reducing the crystallinity, especially for coatings with smaller bilayer periods. Nanoindentation tests revealed that coatings with a bilayer period of 15–20 nm displayed the highest hardness values regardless of the composition. The mechanical properties of the TiSiN/CrN coatings showed no improvement over those of the TiN/CrN coatings, attributed to the Si induced amorphization of the Ti(Si)N phase and the absence of SiN x phase segregation within the TiN nanocrystals in these coatings. These findings provide valuable insights into the microstructure and mechanical properties of TiN/CrN and TiSiN/CrN multilayer coatings deposited by HiPIMS in an industrial scale reactor, paving the way for their application in various industrial sectors.

KW - Hardness

KW - Industrial HiPIMS deposition system

KW - Multilayer coatings

KW - Superlattice

KW - TiN/CrN

KW - TiSiN/CrN

UR - http://www.scopus.com/inward/record.url?scp=85207022073&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2024.131461

DO - 10.1016/j.surfcoat.2024.131461

M3 - Article

VL - 494.2024

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

IS - Part 2 30. October

M1 - 131461

ER -