Mechanical properties of micro-sized copper bending beams machined by the focused ion beam technique

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Authors

  • Christian Motz
  • Thomas Schöberl
  • Reinhard Pippan

Organisational units

Details

Translated title of the contributionMechanical properties of micro-sized copper bending beams machined by the focused ion beam technique
Original languageEnglish
Pages (from-to)4269-4279
JournalActa materialia
Volume53
DOIs
Publication statusPublished - 2005