Mechanical Properties of Atomic-Layer-Deposited Al2O3/Y2O3 Nanolaminate Films on Aluminum toward Protective Coatings

Research output: Contribution to journal › Article › Research › peer-review

Authors

Janne-Petteri Niemelä
Gustavo Mata-Osoro
Carlos Guerra-Nuñez
Remo N. Widmer
Nadia Rohbeck
Thomas E. J. Edwards
Max Döbeli
Krzysztof Maćkosz
Aleksandra Szkudlarek
Yury Kuzminykh
Xavier Maeder
Johann Michler
Bernhard Andreaus
Ivo Utke

Organisational units

Chair of Structural and Functional Ceramics (410)

External Organisational units

Eidgenössische Materialprüfanstalt, EMPA
INFICON AG
Eidgenössische Technische Hochschule Zürich
AGH University of Science and Technology Krakow

Details

Original language	English
Pages (from-to)	6285-6296
Journal	ACS Applied Nano Materials
DOIs	https://doi.org/10.1021/acsanm.2c00378
Publication status	Published - 27 May 2022

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