Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5
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| Translated title of the contribution | Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5 |
|---|---|
| Original language | English |
| Pages (from-to) | 335203-335210 |
| Journal | Journal of physics / D, Applied physics |
| Volume | 46 |
| DOIs | |
| Publication status | Published - 2013 |
