Local strength measurement technique for miniaturised silicon-based components
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011. 2011. 5765812.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Local strength measurement technique for miniaturised silicon-based components
AU - Deluca, Marco
AU - Pletz, Martin
AU - Morianz, Mike
AU - Stahr, Johannes
AU - Supancic, Peter
AU - Danzer, Robert
AU - Bermejo, Raul
PY - 2011
Y1 - 2011
UR - http://www.scopus.com/inward/record.url?scp=79957923627&partnerID=8YFLogxK
U2 - 10.1109/ESIME.2011.5765812
DO - 10.1109/ESIME.2011.5765812
M3 - Conference contribution
AN - SCOPUS:79957923627
SN - 9781457701078
BT - 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011
T2 - 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011
Y2 - 18 April 2011 through 20 April 2011
ER -