Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
Research output: Contribution to journal › Article › Research › peer-review
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Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures. / Hofer, Christian; Teichert, Christian; Werner, Jens et al.
In: Applied surface science, Vol. 256, 2009, p. 267-273.
In: Applied surface science, Vol. 256, 2009, p. 267-273.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Hofer, C, Teichert, C, Werner, J, Lyutovich, K & Kasper, E 2009, 'Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures', Applied surface science, vol. 256, pp. 267-273. https://doi.org/10.1016/j.apsusc.2009.08.013
APA
Hofer, C., Teichert, C., Werner, J., Lyutovich, K., & Kasper, E. (2009). Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures. Applied surface science, 256, 267-273. https://doi.org/10.1016/j.apsusc.2009.08.013
Vancouver
Hofer C, Teichert C, Werner J, Lyutovich K, Kasper E. Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures. Applied surface science. 2009;256:267-273. doi: 10.1016/j.apsusc.2009.08.013
Author
Bibtex - Download
@article{75b68e37270646c4acafc8d14b20564c,
title = "Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures",
author = "Christian Hofer and Christian Teichert and Jens Werner and Klara Lyutovich and Erich Kasper",
year = "2009",
doi = "10.1016/j.apsusc.2009.08.013",
language = "English",
volume = "256",
pages = "267--273",
journal = "Applied surface science",
issn = "0169-4332",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
AU - Hofer, Christian
AU - Teichert, Christian
AU - Werner, Jens
AU - Lyutovich, Klara
AU - Kasper, Erich
PY - 2009
Y1 - 2009
U2 - 10.1016/j.apsusc.2009.08.013
DO - 10.1016/j.apsusc.2009.08.013
M3 - Article
VL - 256
SP - 267
EP - 273
JO - Applied surface science
JF - Applied surface science
SN - 0169-4332
ER -
