Integrated approach to SiC crystal growth: Multiphysics modeling and chemistry assessment in PVT furnaces

Research output: Contribution to conferencePosterResearchpeer-review

Authors

External Organisational units

  • EEMCO GmbH

Details

Original languageEnglish
Publication statusPublished - 2024
EventInternational Conference on Silicon Carbide and Related Materials (ICSCRM 2024) - North Carolina, United States
Duration: 29 Sept 20244 Oct 2024

Conference

ConferenceInternational Conference on Silicon Carbide and Related Materials (ICSCRM 2024)
Country/TerritoryUnited States
CityNorth Carolina
Period29/09/244/10/24