Influence of environmental factors like temperature and humidity on MEMS packaging materials.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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2018 7th Electronic System-Integration Technology Conference, ESTC 2018 - Proceedings. Institute of Electrical and Electronics Engineers, 2018. 8546484.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Influence of environmental factors like temperature and humidity on MEMS packaging materials.
AU - Yalagach, Mahesh
AU - Fuchs, Peter Filipp
AU - Mitev, Ivaylo
AU - Antretter, Thomas
AU - Feuchter, Michael
AU - Wolfberger, Archim
AU - Qi, Tao
PY - 2018/11/26
Y1 - 2018/11/26
KW - hygro-thermo-mechanical simulation
KW - hygroscopic swelling
KW - moisture diffusion
KW - Thermo-mechanical characterization
UR - http://www.scopus.com/inward/record.url?scp=85060016126&partnerID=8YFLogxK
U2 - 10.1109/ESTC.2018.8546484
DO - 10.1109/ESTC.2018.8546484
M3 - Conference contribution
AN - SCOPUS:85060016126
BT - 2018 7th Electronic System-Integration Technology Conference, ESTC 2018 - Proceedings
PB - Institute of Electrical and Electronics Engineers
T2 - 7th Electronic System-Integration Technology Conference, ESTC 2018
Y2 - 18 September 2018 through 21 September 2018
ER -