Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings
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In: Journal of vacuum science & technology / A (JVST), Vol. 36, No. 2, 2018.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings
AU - Saringer, Christian
AU - Oberroither, Christoph
AU - Zorn, Katrin
AU - Franz, Robert
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1116/1.5001141
DO - 10.1116/1.5001141
M3 - Article
VL - 36
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 2
ER -