Influence of deposited metal structures on the failure mechanisms of silicon-based components

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Influence of deposited metal structures on the failure mechanisms of silicon-based components. / Deluca, Marco; Bermejo Moratinos, Raul; Pletz, Martin et al.
In: Journal of the European Ceramic Society, Vol. 32, 2012, p. 4371-4380.

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@article{26ae5a02ace54faba7d039859b2324cf,
title = "Influence of deposited metal structures on the failure mechanisms of silicon-based components",
author = "Marco Deluca and {Bermejo Moratinos}, Raul and Martin Pletz and Manfred Wie{\ss}ner and Peter Supancic and Robert Danzer",
year = "2012",
language = "English",
volume = "32",
pages = "4371--4380",
journal = "Journal of the European Ceramic Society",
issn = "0955-2219",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Influence of deposited metal structures on the failure mechanisms of silicon-based components

AU - Deluca, Marco

AU - Bermejo Moratinos, Raul

AU - Pletz, Martin

AU - Wießner, Manfred

AU - Supancic, Peter

AU - Danzer, Robert

PY - 2012

Y1 - 2012

M3 - Article

VL - 32

SP - 4371

EP - 4380

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

SN - 0955-2219

ER -