Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties
Research output: Contribution to journal › Article › Research › peer-review
Standard
Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. / Pachlhofer, Julia; Martin-Luengo, Aitana Tarazaga; Franz, Robert et al.
In: Journal of vacuum science & technology / A (JVST), Vol. 35.2017, No. 2, 021504, 04.01.2017.
In: Journal of vacuum science & technology / A (JVST), Vol. 35.2017, No. 2, 021504, 04.01.2017.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Pachlhofer, J, Martin-Luengo, AT, Franz, R, Franzke, E, Köstenbauer, H, Winkler, J, Bonanni, A & Mitterer, C 2017, 'Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties', Journal of vacuum science & technology / A (JVST), vol. 35.2017, no. 2, 021504. https://doi.org/10.1116/1.4973214
APA
Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A., & Mitterer, C. (2017). Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. Journal of vacuum science & technology / A (JVST), 35.2017(2), Article 021504. https://doi.org/10.1116/1.4973214
Vancouver
Pachlhofer J, Martin-Luengo AT, Franz R, Franzke E, Köstenbauer H, Winkler J et al. Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. Journal of vacuum science & technology / A (JVST). 2017 Jan 4;35.2017(2):021504. doi: 10.1116/1.4973214
Author
Bibtex - Download
@article{a4282da8b07f4d798794e0fe39e6c366,
title = "Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties",
author = "Julia Pachlhofer and Martin-Luengo, {Aitana Tarazaga} and Robert Franz and Enrico Franzke and Harald K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Christian Mitterer",
year = "2017",
month = jan,
day = "4",
doi = "10.1116/1.4973214",
language = "English",
volume = "35.2017",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Industrial-scale sputter deposition of molybdenum oxide thin films
T2 - Microstructure evolution and properties
AU - Pachlhofer, Julia
AU - Martin-Luengo, Aitana Tarazaga
AU - Franz, Robert
AU - Franzke, Enrico
AU - Köstenbauer, Harald
AU - Winkler, Jörg
AU - Bonanni, Alberta
AU - Mitterer, Christian
PY - 2017/1/4
Y1 - 2017/1/4
U2 - 10.1116/1.4973214
DO - 10.1116/1.4973214
M3 - Article
VL - 35.2017
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 2
M1 - 021504
ER -
