Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute of Energy and Nuclear Research (IPEN-CNEN/SP)
- Oak Ridge National Laboratory (ORNL)
- Universidade do Estado de Santa Catarina
- Universidade de São Paulo
Details
| Original language | English |
|---|---|
| Article number | 864 |
| Number of pages | 8 |
| Journal | SN applied sciences |
| Volume | 2020 |
| Issue number | 2 |
| DOIs | |
| Publication status | E-pub ahead of print - 9 Apr 2020 |
