This master thesis deals with the increase of the layer thickness of an anti-adhesive coating based on organosilanes and also with the incorporation of a marker molecule into this coating. The coating in question has already been developed in the course of preliminary work at the Department of Chemistry of Polymeric Materials at the University of Leoben. With regard to the increase in layer thickness, six influencing parameters were defined, which were varied by means of statistical design of experiments (DOE). In each case, the organosilane coating was applied in a sol-gel process onto silicon wafers and the layer thickness was measured by spectroscopic ellipsometry. The main factors influencing the thickness of the coating, as well as the interactions between these factors, were identified. The layer thicknesses of the samples prepared for the DOE were in the range of 10 – 20 nm..For the chemically covalent incorporation of a marker molecule into the coating, a functional organosilane was synthesized and characterized by NMR and infrared spectroscopy. First, a detectable layer without anti-adhesive properties was applied using the synthesized organosilane. In addition, coatings with both detectable and anti-adhesive functionalities were. Detection of the functional molecules was performed by physico-chemical methods. Finally, the kinetics of the hydrolysis reaction of three organosilanes used in this work were investigated by NMR spectroscopy. Indeed, significant differences were found between the individual organosilanes.