Diffusion Studies in the TiN/Cu Bilayer System and Beyond
Research output: Contribution to conference › Presentation › Research › peer-review
Standard
Diffusion Studies in the TiN/Cu Bilayer System and Beyond. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2016. 43rd International Conference on Metallurgical Coatings and Thin Films 2016, San Diego, United States.
2016. 43rd International Conference on Metallurgical Coatings and Thin Films 2016, San Diego, United States.
Research output: Contribution to conference › Presentation › Research › peer-review
Harvard
Mühlbacher, M, Mendez Martin, F, Sartory, B, Greczynski, G, Lu, J, Schalk, N, Hultman, L & Mitterer, C 2016, 'Diffusion Studies in the TiN/Cu Bilayer System and Beyond', 43rd International Conference on Metallurgical Coatings and Thin Films 2016, San Diego, United States, 25/04/16 - 29/04/16.
APA
Mühlbacher, M., Mendez Martin, F., Sartory, B., Greczynski, G., Lu, J., Schalk, N., Hultman, L., & Mitterer, C. (2016). Diffusion Studies in the TiN/Cu Bilayer System and Beyond. 43rd International Conference on Metallurgical Coatings and Thin Films 2016, San Diego, United States.
Vancouver
Mühlbacher M, Mendez Martin F, Sartory B, Greczynski G, Lu J, Schalk N et al.. Diffusion Studies in the TiN/Cu Bilayer System and Beyond. 2016. 43rd International Conference on Metallurgical Coatings and Thin Films 2016, San Diego, United States.
Author
Bibtex - Download
@conference{25eb8abb6a5f4a008b37f600ce29a901,
title = "Diffusion Studies in the TiN/Cu Bilayer System and Beyond",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Grzegorz Greczynski and Jun Lu and Nina Schalk and Lars Hultman and Christian Mitterer",
year = "2016",
language = "English",
note = "43rd International Conference on Metallurgical Coatings and Thin Films 2016 ; Conference date: 25-04-2016 Through 29-04-2016",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Diffusion Studies in the TiN/Cu Bilayer System and Beyond
AU - Mühlbacher, Marlene
AU - Mendez Martin, Francisca
AU - Sartory, Bernhard
AU - Greczynski, Grzegorz
AU - Lu, Jun
AU - Schalk, Nina
AU - Hultman, Lars
AU - Mitterer, Christian
PY - 2016
Y1 - 2016
M3 - Presentation
T2 - 43rd International Conference on Metallurgical Coatings and Thin Films 2016
Y2 - 25 April 2016 through 29 April 2016
ER -
