Design of multilayer metallization to reduce mechanical loading: Effect of growth conditions on interface stability and thermo-mechanical properties of sputtered Cu films on Si with and without WTi barrier layers

Research output: Contribution to conference › Presentation › Research

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Activities

  1. 2016

  2. 8th International Conference On Technological Advances Of Thin Films and Surface Coatings

    Imane Souli (Speaker)

    12 Jul 2016 → 15 Jul 2016

    Activity: Participating in or organising an event › Participation in conference

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