CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
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| Translated title of the contribution | CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings |
|---|---|
| Original language | English |
| Pages (from-to) | 1691-1697 |
| Journal | Surface & coatings technology |
| Volume | 206 |
| DOIs | |
| Publication status | Published - 2011 |
