CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings

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Authors

Translated title of the contribution	CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
Original language	English
Pages (from-to)	1691-1697
Journal	Surface & coatings technology
Volume	206
DOIs	https://doi.org/10.1016/j.surfcoat.2011.07.086
Publication status	Published - 2011