Characterization of 6H-SiC surfaces after ion implantation and annealing using positron annihilation spectroscopy and atomic force microscopy
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| Translated title of the contribution | Characterization of 6H-SiC surfaces after ion implantation and annealing using positron annihilation spectroscopy and atomic force microscopy |
|---|---|
| Original language | English |
| Pages (from-to) | 023523-1-023523-8 |
| Journal | Journal of applied physics |
| Volume | 99 |
| DOIs | |
| Publication status | Published - 2006 |
