Atom probe specimen preparation and 3D interfacial study of Ti-Al-N thin films

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Authors

Translated title of the contribution	Atom probe specimen preparation and 3D interfacial study of Ti-Al-N thin films
Original language	English
Pages (from-to)	1811-1816
Journal	Surface & coatings technology
Volume	204
DOIs	https://doi.org/10.1016/j.surfcoat.2009.11.020
Publication status	Published - 2010