A structural and topographical study of low-pressure chemical-vapor-deposited polysilicon by scanning probe microscopy
Research output: Contribution to journal › Article › Research › peer-review
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| Original language | English |
|---|---|
| Pages (from-to) | 6749-6754 |
| Journal | Journal of applied physics |
| Volume | 81 |
| Publication status | Published - 1997 |
