A direct method of determining complex depth profiles of residual stresses in thin films on a nanoscale
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| Translated title of the contribution | A direct method of determining complex depth profiles of residual stresses in thin films on a nanoscale |
|---|---|
| Original language | English |
| Pages (from-to) | 4835-4844 |
| Journal | Acta materialia |
| Volume | 55 |
| Publication status | Published - 2007 |
