Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems
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in: Acta Materialia, Jahrgang 191, 06.2020, S. 245-252.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems
AU - Coleman, Kathleen
AU - Bermejo, Raul
AU - Leguillon, Dominique
AU - Trolier-McKinstry, Susan
PY - 2020/6
Y1 - 2020/6
KW - Thin film, PZT, Cracking, Stress criterion, Biaxial bending
UR - https://doi.org/10.1016/j.actamat.2020.03.030
U2 - 10.1016/j.actamat.2020.03.030
DO - 10.1016/j.actamat.2020.03.030
M3 - Article
VL - 191
SP - 245
EP - 252
JO - Acta Materialia
JF - Acta Materialia
SN - 1359-6454
ER -