Refractory high entropy alloys are an interesting material class because of their high thermal stability, decent electrical conductivity, and promising mechanical properties at elevated temperature. In the present work, we report on the thermal stability of body-centered cubic MoNbTaVW solid solution thin films that were synthesized by cathodic arc deposition. After vacuum annealing up to 1600 ^◦ C, the morphology, chemical composition, crystal structure, and electrical conductivity, as well as the mechanical properties, were analyzed. The observed body-centered cubic MoNbTaVW solid solution phase is stable up to 1500 ^◦ C. The evolution of electrical and mechanical properties due to the annealing treatment is discussed based on the observed structural changes of the synthesized thin films.