Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Standard

Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography. / Braun, D.; Gajic, Rados; Kuchar, Friedemar et al.
in: Journal of vacuum science & technology / B (JVST), Jahrgang 21, 2003, S. 123-126.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Harvard

Braun, D, Gajic, R, Kuchar, F, Korntner, R, Haugeneder, E, Löschner, H, Butschke, J, Letzkus, F & Springer, R 2003, 'Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography', Journal of vacuum science & technology / B (JVST), Jg. 21, S. 123-126.

APA

Braun, D., Gajic, R., Kuchar, F., Korntner, R., Haugeneder, E., Löschner, H., Butschke, J., Letzkus, F., & Springer, R. (2003). Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography. Journal of vacuum science & technology / B (JVST), 21, 123-126.

Bibtex - Download

@article{ce767f5d599f48bd8f9572f1cbacfe1f,
title = "Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography",
author = "D. Braun and Rados Gajic and Friedemar Kuchar and Regina Korntner and E. Haugeneder and H. L{\"o}schner and J. Butschke and F. Letzkus and R. Springer",
year = "2003",
language = "English",
volume = "21",
pages = "123--126",
journal = "Journal of vacuum science & technology / B (JVST)",
issn = "0734-211X",
publisher = "AVS Science and Technology Society",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Thermal emissivity of carbon coated p-doped silicon stencil masks for ion projection lithography

AU - Braun, D.

AU - Gajic, Rados

AU - Kuchar, Friedemar

AU - Korntner, Regina

AU - Haugeneder, E.

AU - Löschner, H.

AU - Butschke, J.

AU - Letzkus, F.

AU - Springer, R.

PY - 2003

Y1 - 2003

M3 - Article

VL - 21

SP - 123

EP - 126

JO - Journal of vacuum science & technology / B (JVST)

JF - Journal of vacuum science & technology / B (JVST)

SN - 0734-211X

ER -