Structure evolution in reactively sputtered molybdenum oxide thin films
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in: Vacuum, Nr. 131, 2016, S. 246-251.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Structure evolution in reactively sputtered molybdenum oxide thin films
AU - Pachlhofer, Julia
AU - Jachs, Christoph
AU - Franz, Robert
AU - Franzke, Enrico
AU - Köstenbauer, H.
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2016
Y1 - 2016
KW - Molybdenum oxide
KW - Thin film
KW - MoO2
KW - MoO3
KW - Reactive sputtering
U2 - http://dx.doi.org/10.1016/j.vacuum.2016.07.002
DO - http://dx.doi.org/10.1016/j.vacuum.2016.07.002
M3 - Article
SP - 246
EP - 251
JO - Vacuum
JF - Vacuum
SN - 0042-207X
IS - 131
ER -