Self-structuring in Zr1−xAlxN films as a function of composition and growth temperature
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in: Scientific reports (London : Nature Publishing Group), Jahrgang 8.2018, 16327, 05.11.2018.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Self-structuring in Zr1−xAlxN films as a function of composition and growth temperature
AU - Ghafoor, Naureen
AU - Petrov, I.
AU - Holec, David
AU - Greczynski, G.
AU - Palisaitis, J.
AU - Persson, P.O.Å.
AU - Hultman, Lars
AU - Birch, J.
PY - 2018/11/5
Y1 - 2018/11/5
N2 - Nanostructure formation via surface-diffusion-mediated segregation of ZrN and AlN in Zr1−xAlxN films during high mobility growth conditions is investigated for 0 ≤ × ≤ 1. The large immiscibility combined with interfacial surface and strain energy balance resulted in a hard nanolabyrinthine lamellar structure with well-defined (semi) coherent c-ZrN and w-AlN domains of sub-nm to ~4 nm in 0.2 ≤ × ≤ 0.4 films, as controlled by atom mobility. For high AlN contents (x > 0.49) Al-rich ZrN domains attain wurtzite structure within fine equiaxed nanocomposite wurtzite lattice. Slow diffusion in wurtzite films points towards crystal structure dependent driving force for decomposition. The findings of unlikelihood of iso-structural decomposition in c-Zr1−xAlxN, and stability of w-Zr1−xAlxN (in large × films) is complemented with first principles calculations.
AB - Nanostructure formation via surface-diffusion-mediated segregation of ZrN and AlN in Zr1−xAlxN films during high mobility growth conditions is investigated for 0 ≤ × ≤ 1. The large immiscibility combined with interfacial surface and strain energy balance resulted in a hard nanolabyrinthine lamellar structure with well-defined (semi) coherent c-ZrN and w-AlN domains of sub-nm to ~4 nm in 0.2 ≤ × ≤ 0.4 films, as controlled by atom mobility. For high AlN contents (x > 0.49) Al-rich ZrN domains attain wurtzite structure within fine equiaxed nanocomposite wurtzite lattice. Slow diffusion in wurtzite films points towards crystal structure dependent driving force for decomposition. The findings of unlikelihood of iso-structural decomposition in c-Zr1−xAlxN, and stability of w-Zr1−xAlxN (in large × films) is complemented with first principles calculations.
U2 - 10.1038/s41598-018-34279-w
DO - 10.1038/s41598-018-34279-w
M3 - Article
VL - 8.2018
JO - Scientific reports (London : Nature Publishing Group)
JF - Scientific reports (London : Nature Publishing Group)
SN - 2045-2322
M1 - 16327
ER -
