Photonic superlattice multilayers for EUV lithography infrastructure
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34th European Mask and Lithography Conference. Band 10775 SPIE, 2018. 1077503.
Publikationen: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband
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TY - GEN
T1 - Photonic superlattice multilayers for EUV lithography infrastructure
AU - Kuchar, F.
AU - Meisels, R.
PY - 2018/1/1
Y1 - 2018/1/1
KW - Bragg reflectors
KW - Extreme ultraviolet
KW - Photonic crystals
KW - Superlattices
UR - http://www.scopus.com/inward/record.url?scp=85054677555&partnerID=8YFLogxK
U2 - 10.1117/12.2322410
DO - 10.1117/12.2322410
M3 - Conference contribution
AN - SCOPUS:85054677555
SN - 9781510621213
VL - 10775
BT - 34th European Mask and Lithography Conference
PB - SPIE
T2 - 34th European Mask and Lithography Conference, EMLC 2018
Y2 - 18 June 2018 through 20 June 2018
ER -
