Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films
Publikationen: Konferenzbeitrag › Poster › Forschung
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Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films. / Hofer-Roblyek, Anna Maria; Pichler, Karl-Heinz; Linke, Christian et al.
2018. Postersitzung präsentiert bei ICMCTF, San Diego, USA / Vereinigte Staaten.
2018. Postersitzung präsentiert bei ICMCTF, San Diego, USA / Vereinigte Staaten.
Publikationen: Konferenzbeitrag › Poster › Forschung
Harvard
Hofer-Roblyek, AM, Pichler, K-H, Linke, C, Franz, R, Winkler, J & Mitterer, C 2018, 'Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films', ICMCTF, San Diego, USA / Vereinigte Staaten, 23/04/18 - 27/04/18.
APA
Hofer-Roblyek, A. M., Pichler, K.-H., Linke, C., Franz, R., Winkler, J., & Mitterer, C. (2018). Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films. Postersitzung präsentiert bei ICMCTF, San Diego, USA / Vereinigte Staaten.
Vancouver
Hofer-Roblyek AM, Pichler KH, Linke C, Franz R, Winkler J, Mitterer C. Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films. 2018. Postersitzung präsentiert bei ICMCTF, San Diego, USA / Vereinigte Staaten.
Author
Bibtex - Download
@conference{bbdf566ac1f348cc9b9af0d855cf9242,
title = "Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films",
author = "Hofer-Roblyek, {Anna Maria} and Karl-Heinz Pichler and Christian Linke and Robert Franz and J{\"o}rg Winkler and Christian Mitterer",
year = "2018",
language = "English",
note = "ICMCTF ; Conference date: 23-04-2018 Through 27-04-2018",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films
AU - Hofer-Roblyek, Anna Maria
AU - Pichler, Karl-Heinz
AU - Linke, Christian
AU - Franz, Robert
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
M3 - Poster
T2 - ICMCTF
Y2 - 23 April 2018 through 27 April 2018
ER -
