Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings
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Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings. / Saringer, Christian; Oberroither, Christoph; Zorn, Katrin et al.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 36, Nr. 2, 2018.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 36, Nr. 2, 2018.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Bibtex - Download
@article{74ed8c4c987c4d359cdc7d6a2336c093,
title = "Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings",
author = "Christian Saringer and Christoph Oberroither and Katrin Zorn and Robert Franz and Christian Mitterer",
year = "2018",
doi = "10.1116/1.5001141",
language = "English",
volume = "36",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings
AU - Saringer, Christian
AU - Oberroither, Christoph
AU - Zorn, Katrin
AU - Franz, Robert
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1116/1.5001141
DO - 10.1116/1.5001141
M3 - Article
VL - 36
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 2
ER -
