In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study
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in: Journal of vacuum science & technology / A (JVST), Jahrgang 42.2024, Nr. 2, 023201, 17.01.2024.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation
T2 - A Cu nanoparticle case study
AU - Knabl, Florian
AU - Bandl, Christine
AU - Griesser, Thomas
AU - Mitterer, Christian
N1 - Publisher Copyright: © 2024 Author(s).
PY - 2024/1/17
Y1 - 2024/1/17
N2 - Magnetron sputter inert gas condensation was coupled with quadrupole mass spectrometry for the in situ characterization of a nanoparticle beam. The proposed method allows us to determine the size distribution and the mass flux of the nanoparticles. The measured quadrupole mass spectrometer grid current is converted into a nanoparticle flux and subsequently into a mass flux. Cu nanoparticles were deposited onto Si substrates using different filtering modes of the quadrupole mass spectrometer. Characterization was carried out using a combination of x-ray photoelectron spectroscopy and scanning electron microscopy. Quantitative analysis of the elemental composition of the Si surface revealed a Gaussian distribution of the deposited nanoparticles over the diameter of the rotating substrate holder with a good quantitative agreement with the predictions made from the in situ quantification method.
AB - Magnetron sputter inert gas condensation was coupled with quadrupole mass spectrometry for the in situ characterization of a nanoparticle beam. The proposed method allows us to determine the size distribution and the mass flux of the nanoparticles. The measured quadrupole mass spectrometer grid current is converted into a nanoparticle flux and subsequently into a mass flux. Cu nanoparticles were deposited onto Si substrates using different filtering modes of the quadrupole mass spectrometer. Characterization was carried out using a combination of x-ray photoelectron spectroscopy and scanning electron microscopy. Quantitative analysis of the elemental composition of the Si surface revealed a Gaussian distribution of the deposited nanoparticles over the diameter of the rotating substrate holder with a good quantitative agreement with the predictions made from the in situ quantification method.
UR - http://www.scopus.com/inward/record.url?scp=85182735213&partnerID=8YFLogxK
U2 - 10.1116/6.0003283
DO - 10.1116/6.0003283
M3 - Article
VL - 42.2024
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
IS - 2
M1 - 023201
ER -
