Correlative microstructure and topography informed nanoindentation of copper films
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in: Surface & coatings technology, Jahrgang 308.2016, Nr. 25 December, 25.12.2016, S. 404-413.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Correlative microstructure and topography informed nanoindentation of copper films
AU - Bigl, Stephan
AU - Schöberl, Thomas
AU - Wurster, Stefan
AU - Cordill, Megan
AU - Kiener, Daniel
PY - 2016/12/25
Y1 - 2016/12/25
KW - Contact mechanics
KW - Copper metallization
KW - Grain boundaries
KW - Local mechanical behaviour
KW - Nanoindentation
UR - http://www.scopus.com/inward/record.url?scp=84994530196&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2016.07.104
DO - 10.1016/j.surfcoat.2016.07.104
M3 - Article
AN - SCOPUS:84994530196
VL - 308.2016
SP - 404
EP - 413
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
IS - 25 December
ER -
