CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
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in: Surface & coatings technology, Jahrgang 206, 2011, S. 1691-1697.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
AU - Czettl, Christoph
AU - Mitterer, Christian
AU - Mühle, U.
AU - Rafaja, D
AU - Puchner, S
AU - Hutter, H.
AU - Penoy, M.
AU - Michotte, C.
AU - Kathrein, M.
PY - 2011
Y1 - 2011
U2 - 10.1016/j.surfcoat.2011.07.086
DO - 10.1016/j.surfcoat.2011.07.086
M3 - Article
VL - 206
SP - 1691
EP - 1697
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -