Bragg mirrors with modified period for sub-10-nm wavelengths
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in: OSA continuum, Jahrgang 4.2021, Nr. 11, 08.11.2021, S. 2875-2891.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Bragg mirrors with modified period for sub-10-nm wavelengths
AU - Meisels, Ronald
AU - Kuchar, Friedemar
PY - 2021/11/8
Y1 - 2021/11/8
N2 - Bragg mirrors with superlattices and depth grading of their period are studiednumerically at sub-10-nm wavelengths, using La/B4C and Cr/Sc as bilayer materials at 6.64 and 3.12 nm, respectively. Superlattice-related reflection peaks (between normal incidence and total reflection) are very narrow, and sharpen with decreasing wavelength. Depth grading reduces and broadens the peaks. Together with weighting by source spectra, all-angle reflection is demonstrated. For the normal-incidence peaks, grading and weighting increases their overlap with source spectra and allows enhancement of the total collected power by up to 120% (at 6.64 nm) and 90% (3.12 nm) compared to ungraded mirrors. Interface roughness, determined from experimental data, approximately halves these enhancements.
AB - Bragg mirrors with superlattices and depth grading of their period are studiednumerically at sub-10-nm wavelengths, using La/B4C and Cr/Sc as bilayer materials at 6.64 and 3.12 nm, respectively. Superlattice-related reflection peaks (between normal incidence and total reflection) are very narrow, and sharpen with decreasing wavelength. Depth grading reduces and broadens the peaks. Together with weighting by source spectra, all-angle reflection is demonstrated. For the normal-incidence peaks, grading and weighting increases their overlap with source spectra and allows enhancement of the total collected power by up to 120% (at 6.64 nm) and 90% (3.12 nm) compared to ungraded mirrors. Interface roughness, determined from experimental data, approximately halves these enhancements.
KW - Optical properties Optical superlattices Refractive index Soft x rays
U2 - 10.1364/OSAC.436103
DO - 10.1364/OSAC.436103
M3 - Article
VL - 4.2021
SP - 2875
EP - 2891
JO - OSA continuum
JF - OSA continuum
SN - 2578-7519
IS - 11
ER -