Neuester Forschungsoutput

• Backside metallization affects residual stress and bending strength of the recast layer in laser-diced Si

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Revealing dynamic-mechanical properties of precipitates in a nanostructured thin film using micromechanical spectroscopy

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)