Neuester Forschungsoutput

• Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Design and fabrication of various MEMS-based structures for investigating thermo-mechanical and fatigue behavior of thin metal films and metal barriers

  Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Dissertation